Features

Videos: Spring 2026 Fine Line Video Journal [March 25, 2026]
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Presentation: Only Entirely Curvilinear Masks are Entirely Manufacturable Masks, Aki Fujimura, D2S [February 24, 2026]
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Survey: 2026 Deep Learning/LLM Applications List by eBeam Initiative members [February 24, 2026]
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Event: eBeam Initiative SPIE-AL Annual Lunch and Members Meeting, Tuesday, February 24, 2026
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Videos: Autumn 2025 Fine Line Video Journal [November 5, 2025]
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Survey: 2025 eBeam Initiative Luminaries Survey Results [September 23, 2025]
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Presentation: Technology Analysis of Leading-Edge Semiconductor Manufacturing, Tetsuya Wadaki, Morgan Stanley MUFG [September 23, 2025]
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Press: eBeam Initiative Survey Predicts Continued Growth in Photomask Market This Year - AGC Joins eBeam Initiative [September 23, 2025]
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Event: eBeam Initiative Reception during SPIE Photomask Technology + EUV Conference, Monterey, Calif.; 5:00–7:15pm Sept. 23, 2025
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Videos: Summer 2025 Fine Line Video Journal [June 3, 2025]
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Presentation: Full-Reticle Curvilinear Inline Linearity Correction Including Variable Bias with Zero Turnaround Time by Paris Spinelli, Micron, at PMJ 2025 [April 18, 2025]
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Presentation: Three Ways to Improve Wafer Uniformity by Aki Fujimura, D2S at PMJ 2025 [April 18, 2025]
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Videos: Spring 2025 Fine Line Video Journal [March 26, 2025]
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Presentation: PLDC Improves Uniformity and Linearity for All Masks by Aki Fujimura, D2S [February 25, 2025]
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Event: Save the Date for the PMJ 2025 Finale hosted by the eBeam Initiative. Friday, April 18 right after the final session in the PMJ program and in the same room, the Annex Hall, Pacifico Yokohama.
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Press: eBeam Initiative Member Companies to Take Center Stage at SPIE Advanced Lithography and Patterning Conference [February 18, 2025]
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Survey: 2025 Deep Learning Applications List by eBeam Initiative members [February 18, 2025]
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Event: eBeam Initiative SPIE-AL Annual Lunch and Members Meeting, Tuesday, February 25, 2025

Videos: Autumn 2024 Fine Line Video Journal [October 28, 2024]
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Survey: 2024 eBeam Initiative Luminaries Survey Results [October 1, 2024]
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About Us

Mission | The Initiative provides a forum for educational and promotional activities regarding new design-to-manufacturing approaches based on electron beam (eBeam) technologies. The goals of the eBeam Initiative are to reduce the barriers to adoption to enable more IC design starts and faster time-to-market while increasing the investment in eBeam technologies.


Read the story of the eBeam Initiative


Design Team Advisors | Provide business and technical insights and requirements to the Steering Group and Ecosystem members.


eBeam Member Videos | Proof points, viewpoints and products discussed by eBeam Initiative members.



Leo Pang of D2S shares his insights on 2026 Photomask Japan (PMJ) with eBeam Initiative’s Angie Kellen.


Harry Levinson of HJL Lithography provides a historical perspective on how masks became critical for the semiconductor industry while covering the evolution of lithography.


Kenichi Miyaguchi of imec presents their holistic end-to-end approach to curvilinear enablement for advanced logic scaling.


Asmus Hetzel of D2S describes the limitations of current Gaussian models and introduces Freeform Point Spread Function (FF PSF) models as a solution for EUV (or any) masks.


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eBeam Industry News

Semiecosystem: Latest News in Lithography by Mark LaPedus [June 7, 2026]
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Semiconductor Engineering: Curvilinear Masks Push the Limits of Inspection and Metrology [May 27, 2026]
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Semiconductor Engineering: Mask Technology Faces a New Set of Challenges
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Semiconductor Engineering: eBeam Initiative at SPIE ALP 2026 [April 16, 2026]
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Semiecosystem: Latest News in Lithography by Mark LaPedus [April 3, 2026]
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Semiconductor Engineering: Challenges in Scaling Chips to 2nm and Below by Ed Sperling [March 30, 2026]
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Semiconductor Digest: The Entirely Curvilinear Photomask Era Has Arrived [January 9, 2026]
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